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3M Introduces High-Performance Pad Conditioner for Oxide CMP; New 3M Diamond Pad Conditioner Features Improved Cost of Ownership

Monday, July 12, 2004 9:29 am CDT

Dateline:

SAN FRANCISCO
"3M is committed to the semiconductor industry and is focused on identified customer and industry needs. The new A4-55 pad conditioner is another example of how we're working with our customers to prove that commitment"

SAN FRANCISCO--(BUSINESS WIRE)--3M today introduced an innovative high-performance diamond pad conditioner - the 3M Diamond Pad Conditioner A4-55 - for oxide chemical mechanical planarization (CMP) that upholds 3M's commitment to quality, while offering improved cost of ownership.

"3M is committed to the semiconductor industry and is focused on identified customer and industry needs. The new A4-55 pad conditioner is another example of how we're working with our customers to prove that commitment," said Eric Funkenbusch, business unit manager for 3M.

Constructed with a lightweight polycarbonate backing, the new 3M Diamond Pad Conditioner A4-55 offers lower cost of ownership. Like all 3M diamond pad conditioners, it provides high-quality, consistent lot-to-lot performance with superior diamond retention. The 3M A4-55 also optimizes conditioner aggressiveness for extended pad life. In addition, the new 3M pad conditioner offers an extremely flat area of active diamonds for lower nonuniformity and excellent pad planarity as well as consistent debris removal. The exclusive polymer substrate enhances corrosion resistance. Upgraded packaging for the 3M A4-55 also helps provide excellent contamination control and cleanroom compatibility.

The 3M A4-55 is the newest addition to 3M's line of diamond pad conditioners that meet a variety of customer-specific needs for a variety of manufacturing platforms. The entire line features a mechanical and chemical bond to keep diamonds intact for excellent diamond retention - reducing the possibility of macro-scratching - and improved wafer yields.

For more information about the complete 3M Diamond Pad Conditioner line or 3M Electronics Markets Materials Division, call 1-800-251-8634 or visit www.3M.com/electronicmaterials.

3M Electronics Markets Materials Division will be exhibiting at Booth # 2502 at SEMICON West, in San Francisco, July 12-14, 2004.

About 3M Electronics Markets Materials Division

3M Electronics Markets Materials Division is a leading supplier to key global electronics manufacturers, offering a broad range of innovative materials and services to help produce components and subassemblies. Materials provided include next-generation adhesives, tapes, abrasives and specialty fluids and gases. In addition, the 3M Electronics Markets Materials Division helps customers improve their products and solve problems by helping them improve efficiencies in their manufacturing processes using 3M technologies.

About 3M -- A Global, Diversified Technology Company

Every day, 3M people find new ways to make amazing things happen. Wherever they are, whatever they do, the company's customers know they can rely on 3M to help make their lives better. 3M's brands include icons such as Scotch, Post-it, Scotchgard, Thinsulate, Scotch-Brite, Filtrete, Command and Vikuiti. Serving customers in more than 200 countries around the world, the company's 67,000 people use their expertise, technologies and global strength to lead in major markets including consumer and office; display and graphics; electronics and telecommunications; safety, security and protection services; health care; industrial and transportation. For more information, including the latest product and technology news, visit www.3M.com.

3M, Scotch, Post-it, Scotchgard, Thinsulate, Scotch-Brite, Filtrete, Command and Vikuiti are trademarks of 3M.

Contact:

LaBreche Murray Public Relations
Stephani Simon, 612-392-7613
ssimon@labrechemurray.com
or
3M
Ron Wenaas, 651-736-7918
www.3M.com/profile/pressbox/media_contacts.jhtml

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